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Vortex Batch ALD
High-volume production batch using rotating discs or cylinders to transport substrates.
TransFlexTM Roll to Roll ALD
Continuous coating creation for large-area substrate films and foils.
Rapid Thermal ALD
An innovative way to unlock the power of high temperature thermal ALD.
PlasmaShieldTM
Ultra-precise deposition zones with PlasmaShieldTM technology.
Sheet-to-Sheet Processing Platform
PlasmaShieldTM technology with linear substrate movement for large area processing.
In-Line Roll to Roll Platform
A flexible Roll-to-Roll platform for moderate speed PEALD with straightforward web handling.
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New from LotusAT and the ALD Community
Check out our technology featured in Beneq's C2R spatial ALD tool!
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