ALD News

New from LotusAT and the ALD Community

Lotus News: Lotus AT's Eric Dickey Presenting at 2024 SVC Tech Con in Chicago, IL on Monday May 6, 2024

We hope you will come join us at 2024 SVC Tech Con in Chicago to see Eric's presentation on scaling ALD processing to large area substrates

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News

Lotus News: Lotus AT's Bryan Danforth Presenting at 2024 SVC Tech Con in Chicago, IL on Monday May 6, 2024

We hope you will come join us at 2024 SVC Tech Con in Chicago to see Bryan's presentation on environmentally robust barrier layers

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Articles

Lotus Archives: Optimization of Precursor Utilization Using Spatial ALD

This is a great paper that we published at SVC Tech Con 2016 in which we explain how to maximize precursor utilization in spatial ALD via trap and reuse!

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Lotus News: Lotus AT Presenting at 2024 ALD For Industry Conference

Visit us at 2024 ALD for Industry Conference in Dresden, Germany to see our latest research publication!

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Articles

Lotus Archives: High Rate R2R Spatial ALD - Serpentine Web Translation

Here we revisit one of Lotus' flagship publications featured in JVST-A back in 2012 about high-rate roll-to-roll spatial ALD using serpentine web translation.

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Lotus News: Lotus AT technology in use at LZH Optics Lab

Learn more about our partnership with Beneq in action at the Optics Integration Lab in Lazer Zentrum Hanover, Germany.

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