ALD Redefined
Fast, Affordable, Unmatched
Experience speed, affordability, and precision that will elevate your success. With high-quality coatings produced up to 1000x faster than traditional ALD, you’ll stay ahead in an industry where slow isn’t an option.
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What We Do
By redefining ALD with faster, more efficient, and cost-effective solutions, Lotus AT empowers partners to innovate, streamline production, and scale with confidence.
experience
Leading semiconductor and technology companies for over 3 decades, we future-proof high-speed coating solutions for a wide range of materials, substrates, and applications.
Reliability
Stay ahead and stand out with seamless technology integration, continuous innovation, and in-depth market feasibility assessments. Partnering with Lotus AT means minimizing risks and maximizing ROI.
View Our Technology
Vortex ALD
A rotary batch technology that uses rotation of a disc or cylinder to transport substrates.
TransFlex
High-speed, low-cost Roll-to-Roll ALD that weaves a flexible substrate through separate precursor regions.
Rapid Thermal ALD
Uses a “flash” of temperature to convert the chemisorbed precursor to the final coating product.
Sheet-to-Sheet
Deposit 1-5 ALD cycles with each pass of the substrate, with up to 5 cycles per second for large area sheet processing.
PlasmaShield
Highly localized plasma source with a deactivation shroud for suspended operation in precursor-filled chambers.
In-Line Roll to Roll
A flexible Roll-to-Roll platform for moderate speed PEALD with straightforward web handling.
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Up to
Faster
Years Experience
Spacial ALD Experience
Resources
Explore blog articles on ALD innovations, market trends, and case studies plus industry news shaping the future of thin-film deposition.