Leaders in Spatial ALD
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Conventional ALD is an extremely precise manufacturing technique, but it can be complicated and costly.
Over the course of more than 15 years designing and implementing spatial ALD, Lotus AT has developed a broad set of proprietary techniques for cost-effective application of ALD technology.
VortexTM ALD
A rotary batch technology that uses rotation of a disc or cylinder to transport the substrates
TransFlexTM
Roll to Roll ALD
By far the fastest roll to roll ALD coating method ever demonstrated - up to 10 meters per second.
Rapid Thermal ALD
An innovative way to unlock the power of high temperature thermal ALD at lower substrate temperatures.
VortexTM ALD
A rotary batch technology that uses rotation of a disc or cylinder to transport the substrates
TransFlexTM
Roll to Roll ALD
By far the fastest roll to roll ALD coating method ever demonstrated - up to 10 meters per second.
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Rapid Thermal ALD
A unique way to selectively deposit or “print” ALD films with sub-millimeter dimensions.
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Sheet-to-Sheet Processing Platform
PlasmaShieldTM technology with linear substrate movement for large area processing.
Sheet-to-Sheet Processing Platform
A flexible Roll-to-Roll platform for moderate speed PEALD with straightforward web handling.
Lotus engages with major key players in emerging applications of industrial ALD, including Fortune 500 companies and other worldwide leaders.
Lotus News: LotusAT @ 2024 AVS International Conference: Vendor Exhibitor
Join us in Tampa, FL on November 5-7, 2024 to explore the various ways that Lotus AT coating and consulting services can help find better, faster, more efficient solutions for thin film applications.
Lotus News: LotusAT @ 2024 ECS PRiME Conference - Presenting High Speed ALD film growth on 3D Objects
Join us in Hawaii to attend Eric Dickey's presentation of high speed ALD with double-sided plasma!
Lotus News: LotusAT @ 2024 AVS ALD Conference - Presenting ALD film growth at 30 A/sec while maintaining saturation and conformality!
Join us in Helsinki to attend Eric Dickey's presentation of ALD at world class speed.
Lotus Archives: Myth Busting - Conformal films via Plasma ALD!
In this post, we bust the common misconception that plasma is not compatible with high aspect ratio features for ALD coatings.
Lotus News: Lotus AT's Bryan Danforth Presenting at 2024 SVC Tech Con in Chicago, IL on Monday May 6, 2024
We hope you will come join us at 2024 SVC Tech Con in Chicago to see Bryan's presentation on environmentally robust barrier layers
Lotus Archives: Optimization of Precursor Utilization Using Spatial ALD
This is a great paper that we published at SVC Tech Con 2016 in which we explain how to maximize precursor utilization in spatial ALD via trap and reuse!
Lotus News: Lotus AT Presenting at 2024 ALD For Industry Conference
Visit us at 2024 ALD for Industry Conference in Dresden, Germany to see our latest research publication!
Lotus Archives: High Rate R2R Spatial ALD - Serpentine Web Translation
Here we revisit one of Lotus' flagship publications featured in JVST-A back in 2012 about high-rate roll-to-roll spatial ALD using serpentine web translation.
Lotus News: Lotus AT technology in use at LZH Optics Lab
Learn more about our partnership with Beneq in action at the Optics Integration Lab in Lazer Zentrum Hanover, Germany.
Lotus News: Lotus AT technology integrated into Beneq C2R tool
Check out our technology featured in Beneq's C2R spatial ALD tool!
Want to work with us?
If you're looking to learn how ALD could work in your application, we'd love to talk.
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