Capabilities
ALD is used in a wide range of industries.
Applications
Learn about spatial ALD applications.
Vortex™ ALD
High-volume production batch using rotating discs or cylinders to transport substrates.
TransFlex™ Roll-to-Roll ALD
Continuous coating creation for large-area substrate films and foils.
Rapid Thermal ALD
An innovative way to unlock the power of high temperature thermal ALD.
PlasmaShield™
Ultra-precise deposition zones with PlasmaShieldTM technology.
Sheet-to-Sheet Processing Platform
PlasmaShieldTM technology with linear substrate movement for large area processing.
In-Line Roll-to-Roll Platform
A flexible Roll-to-Roll platform for moderate speed PEALD with straightforward web handling.
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Author:
Erin Sprint
Topic:
Published:
February 28, 2025
Featured
News
Lotus News: LotusAT @ 2025 ALD For Industry Conference - Presenting on Novel Precursor Separation Method
Lotus News: LotusAT @ 2024 AVS International Conference: Vendor Exhibitor
Lotus News: LotusAT @ 2024 ECS PRiME Conference - Presenting High Speed ALD film growth on 3D Objects
